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sj-docx-1-pie-10.1177_09544089221124226 - Supplemental material for Synthesis of Al2O3/SiO2 core–shell composite abrasives toward ultrasmooth and high-efficiency polishing for sapphire wafers

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posted on 23.09.2022, 00:11 authored by Yongchao Xu, Guangen Zhao, Qianting Wang, Youji Zhan, Bingsan Chen

Supplemental material, sj-docx-1-pie-10.1177_09544089221124226 for Synthesis of Al2O3/SiO2 core–shell composite abrasives toward ultrasmooth and high-efficiency polishing for sapphire wafers by Yongchao Xu, Guangen Zhao, Qianting Wang and Youji Zhan, Bingsan Chen in Proceedings of the Institution of Mechanical Engineers, Part E: Journal of Process Mechanical Engineering

Funding

Educational and Scientific Research Program for Young and Middle-aged Teachers of the Education Department of Fujian Province

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