PIC903764 Supplemental Material - Supplemental material for Analysis of coupled motion constraints and coupling errors for a six-axis magnetic levitation stage

Supplemental material, PIC903764 Supplemental Material for Analysis of coupled motion constraints and coupling errors for a six-axis magnetic levitation stage by Xiaochao Sheng, Chia-Hsiang Menq and Tao Tao in Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science