@article{Sheng2020, author = "Xiaochao Sheng and Chia-Hsiang Menq and Tao Tao", title = "{PIC903764 Supplemental Material - Supplemental material for Analysis of coupled motion constraints and coupling errors for a six-axis magnetic levitation stage}", year = "2020", month = "2", url = "https://sage.figshare.com/articles/dataset/PIC903764_Supplemental_Material_-_Supplemental_material_for_Analysis_of_coupled_motion_constraints_and_coupling_errors_for_a_six-axis_magnetic_levitation_stage/11848128", doi = "10.25384/SAGE.11848128.v1" }